"Atomic visualization of the emergence of orthorhombic phase in ..."

Tianjiao Xin et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830185

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Tianjiao Xin, Yonghui Zheng, Yan Cheng, Kai Du, Yiwei Wang, Zhaomeng Gao, Diqing Su, Yunzhe Zheng, Qilan Zhong, Cheng Liu, Rong Huang, Chungang Duan, Sannian Song, Zhitang Song, Hangbing Lyu:
Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2 ferroelectric film with in-situ rapid thermal annealing. VLSI Technology and Circuits 2022: 343-344

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