"Optimizing capacity assignment of multiple identical metrology tools."

Stéphane Dauzère-Pérès, Michael Hassoun, Alejandro Sendón (2016)

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DOI: 10.1109/WSC.2016.7822308

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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Stéphane Dauzère-Pérès, Michael Hassoun, Alejandro Sendón:
Optimizing capacity assignment of multiple identical metrology tools. WSC 2016: 2709-2718

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