"Microelectronics Using Electron-Beam-Activated Machining Techniques."

Kenneth R. Shoulders (1961)

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DOI: 10.1016/S0065-2458(08)60142-4

access: closed

type: Journal Article

metadata version: 2020-05-20

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Kenneth R. Shoulders:
Microelectronics Using Electron-Beam-Activated Machining Techniques. Adv. Comput. 2: 135-293 (1961)

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