"A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition."

Uzma Batool et al. (2021)

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DOI: 10.1109/ACCESS.2021.3106171

access: open

type: Journal Article

metadata version: 2021-09-01

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Uzma Batool, Mohd Ibrahim Shapiai, Muhammad Tahir, Zool Hilmi Ismail, Noor Jannah Zakaria, Ahmed Elfakharany:
A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition. IEEE Access 9: 116572-116593 (2021)

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