"Real-Time Direction Judgment System of Sub-Nanometer Scale Grating Ruler."

Simin Li et al. (2021)

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DOI: 10.1109/ACCESS.2021.3081152

access: open

type: Journal Article

metadata version: 2021-06-01

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Simin Li, Jingkun Wang, Wentao Zhang, Hao Du, Xianming Xiong:
Real-Time Direction Judgment System of Sub-Nanometer Scale Grating Ruler. IEEE Access 9: 74939-74948 (2021)

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