"Demonstration of ACO-Based Freeform Source for ArF Laser Immersion ..."

Frederick Lie et al. (2017)

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DOI: 10.1109/ACCESS.2017.2694854

access: open

type: Journal Article

metadata version: 2018-07-04

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Frederick Lie, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, Hung-Fei Kuo:
Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System. IEEE Access 5: 6421-6428 (2017)

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