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"Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices."
Jia Liu et al. (2020)
- Jia Liu
, Pinggang Jia, Jiashun Li, Fei Feng, Ting Liang, Wenyi Liu, Jijun Xiong
:
Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices. IEEE Access 8: 67242-67249 (2020)
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