Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning ..."

Tze Chiang Tin, Saw Chin Tan, Ching Kwang Lee (2022)

> Home

Details and statistics

DOI: 10.1109/ACCESS.2022.3193783

access: open

type: Journal Article

metadata version: 2022-09-26

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/access/TinTL22
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/access/TinTL22
Tze Chiang Tin, Saw Chin Tan, Ching Kwang Lee:
Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks. IEEE Access 10: 81960-81973 (2022)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.