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"Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A ..."

Mario Versaci, Alessandra Jannelli, Giovanni Angiulli (2020)

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DOI: 10.1109/ACCESS.2020.3008332

access: open

type: Journal Article

metadata version: 2020-07-31

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Mario Versaci, Alessandra Jannelli, Giovanni Angiulli:
Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile. IEEE Access 8: 125874-125886 (2020)

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