"Quantitative Evaluation of Line-Edge Roughness in Various FinFET ..."

Sangho Yu et al. (2022)

> Home

Details and statistics

DOI: 10.1109/ACCESS.2022.3156118

access: open

type: Journal Article

metadata version: 2024-10-06

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/access/YuWBSS22
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/access/YuWBSS22
Sangho Yu, Sang Min Won, Hyoung Won Baac, Donghee Son, Changhwan Shin:
Quantitative Evaluation of Line-Edge Roughness in Various FinFET Structures: Bayesian Neural Network With Automatic Model Selection. IEEE Access 10: 26340-26346 (2022)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.