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"Development of an e-Diagnostics/Maintenance framework for semiconductor ..."

Min-Hsiung Hung et al. (2003)

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DOI: 10.1016/J.AEI.2004.07.004

access: closed

type: Journal Article

metadata version: 2020-02-20

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Min-Hsiung Hung, Kuan-Yii Chen, Rui-Wen Ho, Fan-Tien Cheng:
Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations. Adv. Eng. Informatics 17(3-4): 165-178 (2003)

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