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"Run-to-run control and state estimation in high-mix semiconductor ..."

Christopher A. Bode et al. (2007)

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DOI: 10.1016/J.ARCONTROL.2007.07.001

access: closed

type: Journal Article

metadata version: 2023-09-30

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Christopher A. Bode, Jin Wang, Q. Peter He, Thomas F. Edgar:
Run-to-run control and state estimation in high-mix semiconductor manufacturing. Annu. Rev. Control. 31(2): 241-253 (2007)

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