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"Device photolithography: The step-and-repeat camera."
D. S. Alles et al. (1970)
- D. S. Alles, J. W. Elek, F. L. Howland, B. Nevis, R. J. Nielsen, W. A. Schlegel, J. G. Skinner, C. E. Stout:
Device photolithography: The step-and-repeat camera. Bell Syst. Tech. J. 49(9): 2145-2177 (1970)
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