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"Device photolithography: The primary pattern generator part i-optical design."

Morton J. Cowan et al. (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02510.X

access: closed

type: Journal Article

metadata version: 2020-03-03

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  - journals/bstj/CowanHJZ70
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  - https://dblp.org/rec/journals/bstj/CowanHJZ70
Morton J. Cowan, D. R. Herriott, A. M. Johnson, A. Zacharias:
Device photolithography: The primary pattern generator part i-optical design. Bell Syst. Tech. J. 49(9): 2033-2041 (1970)

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