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"Device photolithography: The primary pattern generator part iii-the ..."

Patrick G. Dowd et al. (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02512.X

access: closed

type: Journal Article

metadata version: 2020-03-03

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  - https://dblp.org/rec/journals/bstj/DowdCRZ70
Patrick G. Dowd, Morton J. Cowan, Peter E. Rosenfeld, A. Zacharias:
Device photolithography: The primary pattern generator part iii-the control system. Bell Syst. Tech. J. 49(9): 2061-2067 (1970)

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