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"Device photolithography: The primary pattern generator part ii-mechanical ..."
G. J. W. Kossyk et al. (1970)
- G. J. W. Kossyk, J. P. Laico, L. Rongved, J. W. Stafford:
Device photolithography: The primary pattern generator part ii-mechanical design. Bell Syst. Tech. J. 49(9): 2043-2059 (1970)
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