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"Investigation of the chemical vapor deposition of Cu from copper amidinate ..."

Rowan Spencer et al. (2021)

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DOI: 10.1016/J.COMPCHEMENG.2021.107289

access: closed

type: Journal Article

metadata version: 2023-08-06

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Rowan Spencer, Pavlos A. Gkinis, E. D. Koronaki, Dimitrios I. Gerogiorgis, Stéphane P. A. Bordas, Andreas G. Boudouvis:
Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling. Comput. Chem. Eng. 149: 107289 (2021)

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