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"Linearity analysis of closed-loop capacitive accelerometer due to distance ..."

Jingqing Huang et al. (2014)

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DOI: 10.1007/S11432-013-4863-0

access: closed

type: Journal Article

metadata version: 2020-03-02

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  - journals/chinaf/HuangZZCHWZLGH14
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  - https://dblp.org/rec/journals/chinaf/HuangZZCHWZLGH14
Jingqing Huang, Meng Zhao, Tingting Zhang, Zhongjian Chen, Lichen Hong, Feng Wu, Yacong Zhang, Wengao Lu, Chengchen Gao, Yilong Hao:
Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array. Sci. China Inf. Sci. 57(6): 1-12 (2014)

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