"Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: ..."

Fazhi Song et al. (2018)

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DOI: 10.1155/2018/5406035

access: open

type: Journal Article

metadata version: 2020-09-24

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  - journals/complexity/SongLCLT18
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  - https://dblp.org/rec/journals/complexity/SongLCLT18
Fazhi Song, Yang Liu, Jun Cao, Li Li, Jiubin Tan:
Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Complex. 2018: 5406035:1-5406035:11 (2018)

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