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"Cycle time analysis of dual-arm cluster tools for wafer fabrication ..."
Yan Qiao et al. (2015)
- Yan Qiao, Naiqi Wu, Qinghua Zhu, Liping Bai:
Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times. Comput. Oper. Res. 53: 252-260 (2015)
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