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"Autonomous sputter synthesis of thin film nitrides with composition ..."

Davi M. Febba et al. (2023)

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DOI: 10.48550/ARXIV.2305.11122

access: open

type: Informal or Other Publication

metadata version: 2023-05-24

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  - journals/corr/abs-2305-11122
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  - https://dblp.org/rec/journals/corr/abs-2305-11122
Davi M. Febba, Kevin R. Talley, Kendal Johnson, Stephen Schaefer, Sage R. Bauers, John S. Mangum, Rebecca W. Smaha, Andriy Zakutayev:
Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission. CoRR abs/2305.11122 (2023)

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