"Discovering deposition process regimes: leveraging unsupervised learning ..."

Geremy Loachamín Suntaxi et al. (2024)

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DOI: 10.48550/ARXIV.2405.18444

access: open

type: Informal or Other Publication

metadata version: 2024-06-24

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Geremy Loachamín Suntaxi, Paris Papavasileiou, Eleni D. Koronaki, Dimitrios G. Giovanis, Georgios Gakis, Ioannis G. Aviziotis, Martin Kathrein, Gabriele Pozzetti, Christoph Czettl, Stéphane P. A. Bordas, Andreas G. Boudouvis:
Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis. CoRR abs/2405.18444 (2024)

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