"A Benchmark Time Series Dataset for Semiconductor Fabrication ..."

Vamsi Krishna Pendyala et al. (2024)

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DOI: 10.48550/ARXIV.2408.09307

access: open

type: Informal or Other Publication

metadata version: 2025-02-24

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Vamsi Krishna Pendyala, Hessam S. Sarjoughian, Bala Potineni, Edward J. Yellig:
A Benchmark Time Series Dataset for Semiconductor Fabrication Manufacturing Constructed using Component-based Discrete-Event Simulation Models. CoRR abs/2408.09307 (2024)

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