"Frequency domain identification for multivariable motion control systems: ..."

Maarten van der Hulst et al. (2025)

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DOI: 10.48550/ARXIV.2503.02869

access: open

type: Informal or Other Publication

metadata version: 2025-07-04

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  - journals/corr/abs-2503-02869
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  - https://dblp.org/rec/journals/corr/abs-2503-02869
Maarten van der Hulst, Rodrigo A. González, Koen Classens, Paul Tacx, Nic Dirkx, Jeroen van de Wijdeven, Tom Oomen:
Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage. CoRR abs/2503.02869 (2025)

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