"Kinetic plasma simulations for three dielectric etchers."

Y. J. Hong et al. (2007)

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DOI: 10.1016/J.CPC.2007.02.070

access: closed

type: Journal Article

metadata version: 2020-02-21

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Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee:
Kinetic plasma simulations for three dielectric etchers. Comput. Phys. Commun. 177(1-2): 122-123 (2007)

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