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"Effect of sputtering condition on the surface properties of silicon oxide ..."

Shi-Joon Sung et al. (2010)

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DOI: 10.1016/J.DISPLA.2010.02.005

access: closed

type: Journal Article

metadata version: 2017-05-17

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Shi-Joon Sung, Eun-Ae Jung, Dae-Hwan Kim, Jin-Kyu Kang, Kee-Jeong Yang, Yun Seon Do, Byeong-Dae Choi:
Effect of sputtering condition on the surface properties of silicon oxide thin films prepared for liquid crystal alignment layers. Displays 31(2): 93-98 (2010)

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