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"Historie und Entwicklung des dünnschichttechnologischen ..."

Johannes Schalko et al. (2022)

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DOI: 10.1007/S00502-022-01056-7

access: closed

type: Journal Article

metadata version: 2022-10-10

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  - journals/ei/SchalkoJKKB22
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  - https://dblp.org/rec/journals/ei/SchalkoJKKB22
Johannes Schalko, Artur Jachimowicz, Franz Kohl, Franz Keplinger, Roman Beigelbeck:
Historie und Entwicklung des dünnschichttechnologischen Reinraumlabors am Institut von Professor Paschke. Elektrotech. Informationstechnik 139(6): 565-568 (2022)

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