"Sequential wafer map inspection via feedback loop with reinforcement learning."

Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen (2025)

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DOI: 10.1016/J.ESWA.2025.126996

access: closed

type: Journal Article

metadata version: 2025-04-08

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Aleksandr Dekhovich, Oleg Soloviev, Michel Verhaegen:
Sequential wafer map inspection via feedback loop with reinforcement learning. Expert Syst. Appl. 275: 126996 (2025)

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