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"Spline regression based feature extraction for semiconductor process fault ..."
Jonghyuck Park et al. (2011)
- Jonghyuck Park, Ick-Hyun Kwon, Sung-Shick Kim, Jun-Geol Baek
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Spline regression based feature extraction for semiconductor process fault detection using support vector machine. Expert Syst. Appl. 38(5): 5711-5718 (2011)
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