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"Process requirements for continued scaling of CMOS-the need and prospects ..."

Paul D. Agnello (2002)

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DOI: 10.1147/RD.462.0317

access: closed

type: Journal Article

metadata version: 2020-03-13

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Paul D. Agnello:
Process requirements for continued scaling of CMOS-the need and prospects for atomic-level manipulation. IBM J. Res. Dev. 46(2-3): 317-338 (2002)

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