"X-ray mask repair."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Patricia G. Blauner, John Mauer (1993)

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DOI: 10.1147/RD.373.0421

access: closed

type: Journal Article

metadata version: 2020-03-13

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Patricia G. Blauner, John Mauer:
X-ray mask repair. IBM J. Res. Dev. 37(3): 421-434 (1993)

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