"Implanted Source/Drain Junctions for Polysilicon Gate Technologies."

Hank J. Geipel, R. B. Shasteen (1980)

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DOI: 10.1147/RD.243.0362

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type: Journal Article

metadata version: 2024-10-30

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Hank J. Geipel, R. B. Shasteen:
Implanted Source/Drain Junctions for Polysilicon Gate Technologies. IBM J. Res. Dev. 24(3): 362-369 (1980)

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