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"Chemical amplification resists: History and development within IBM."

Hiroshi Ito (2000)

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DOI: 10.1147/RD.441.0119

access: closed

type: Journal Article

metadata version: 2023-02-09

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Hiroshi Ito:
Chemical amplification resists: History and development within IBM. IBM J. Res. Dev. 44(1): 119-131 (2000)

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