"Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures."

Martin A. Lutz, Randall M. Feenstra, Jack O. Chu (1995)

> Home

Details and statistics

DOI: 10.1147/RD.396.0629

access: closed

type: Journal Article

metadata version: 2020-03-13

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/ibmrd/LutzFC95
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ibmrd/LutzFC95
Martin A. Lutz, Randall M. Feenstra, Jack O. Chu:
Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures. IBM J. Res. Dev. 39(6): 629-638 (1995)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.