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"A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation ..."

Daisuke Yamane et al. (2010)

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DOI: 10.1587/ELEX.7.1785

access: open

type: Journal Article

metadata version: 2021-02-12

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  - journals/ieiceee/YamaneSKFT10
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  - https://dblp.org/rec/journals/ieiceee/YamaneSKFT10
Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, Hiroshi Toshiyoshi:
A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design. IEICE Electron. Express 7(24): 1785-1789 (2010)

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