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"Fabrication of embossed capacitive micromachined ultrasonic transducers ..."
Yuanyu Yu et al. (2019)
- Yuanyu Yu, Jiujiang Wang, Sio-Hang Pun, Ching-Hsiang Cheng, Kin Fong Lei, Mang I Vai, Shuang Zhang, Peng Un Mak:
Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process. IEICE Electron. Express 16(2): 20181002 (2019)
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