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"Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) ..."
Seung-Bin Baek, Dae-Hee Kim, Yeong-Cheol Kim (2011)
- Seung-Bin Baek, Dae-Hee Kim, Yeong-Cheol Kim:
Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO2 Thin-Film Growth Using Density Functional Theory. IEICE Trans. Electron. 94-C(5): 771-774 (2011)
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