"Development of an Enterprise-Wide Yield Management System Using Critical ..."

Yuichi Hamamura et al. (2009)

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DOI: 10.1587/TRANSELE.E92.C.144

access: closed

type: Journal Article

metadata version: 2020-04-11

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Yuichi Hamamura, Chizu Matsumoto, Yoshiyuki Tsunoda, Koji Kamoda, Yoshio Iwata, Kenji Kanamitsu, Daisuke Fujiki, Fujihiko Kojika, Hiromi Fujita, Yasuo Nakagawa, Shun'ichi Kaneko:
Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing. IEICE Trans. Electron. 92-C(1): 144-152 (2009)

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