"A Study on Substrate Orientation Dependence of Si Surface Flattening ..."

Sohya Kudoh, Shun'ichiro Ohmi (2016)

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DOI: 10.1587/TRANSELE.E99.C.504

access: closed

type: Journal Article

metadata version: 2020-04-11

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Sohya Kudoh, Shun'ichiro Ohmi:
A Study on Substrate Orientation Dependence of Si Surface Flattening Process by Sacrificial Oxidation and Its Effect on MIS Diode Characteristics. IEICE Trans. Electron. 99-C(5): 504-509 (2016)

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