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"Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering ..."
Kanji Yasui et al. (2009)
- Kanji Yasui
, Yutaka Ooshima, Yuichiro Kuroki, Hiroshi Nishiyama, Masasuke Takata, Tadashi Akahane:
Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode. IEICE Trans. Electron. 92-C(12): 1438-1442 (2009)
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