"The Effect of Kr/O2 Sputtering on the Ferroelectric Properties ..."

Binjian Zeng et al. (2019)

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DOI: 10.1587/TRANSELE.2018FUP0005

access: closed

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/ieicet/ZengLPLZO19
Binjian Zeng, Jiajia Liao, Qiangxiang Peng, Min Liao, Yichun Zhou, Shun'ichiro Ohmi:
The Effect of Kr/O₂ Sputtering on the Ferroelectric Properties of SrBi₂Ta₂O₉ Thin Film Formation. IEICE Trans. Electron. 102-C(6): 441-446 (2019)

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