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"A MOEMS Accelerometer Based on Diffraction Grating with Improved ..."

Qianbo Lu et al. (2015)

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DOI: 10.20965/IJAT.2015.P0473

access: closed

type: Journal Article

metadata version: 2021-07-25

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  - https://dblp.org/rec/journals/ijat/LuLLWBY15
Qianbo Lu, Wenxiu Lian, Shuqi Lou, Chen Wang, Jian Bai, Guoguang Yang:
A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure. Int. J. Autom. Technol. 9(5): 473-481 (2015)

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