"Design And Fabrication Of SIO2 Micromechanical Structures ..."

Prem Pal, Suneet Tuli, Sudhir Chandra (2003)

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DOI: 10.1142/S1465876303001587

access: closed

type: Journal Article

metadata version: 2020-07-09

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Prem Pal, Suneet Tuli, Sudhir Chandra:
Design And Fabrication Of SIO₂ Micromechanical Structures Inside Anisotropically Etched Cavity. Int. J. Comput. Eng. Sci. 4(3): 489-492 (2003)

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