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"Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively ..."

Tietun Sun et al. (2003)

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DOI: 10.1142/S1465876303001174

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - journals/ijces/SunMZIS03
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  - https://dblp.org/rec/journals/ijces/SunMZIS03
Tietun Sun, Jianmin Miao, Hong Zhu, Ciprian Iliescu, Jianbo Sun:
Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher. Int. J. Comput. Eng. Sci. 4(2): 319-322 (2003)

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