"A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing ..."

W. J. Wang et al. (2003)

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DOI: 10.1142/S1465876303001393

access: closed

type: Journal Article

metadata version: 2020-07-09

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W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo:
A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing Application. Int. J. Comput. Eng. Sci. 4(2): 409-412 (2003)

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