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"Edge chipping in rotary ultrasonic machining of silicon."

W. L. Cong et al. (2012)

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DOI: 10.1504/IJMR.2012.048699

access: closed

type: Journal Article

metadata version: 2020-08-25

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W. L. Cong, Q. Feng, Z. J. Pei, Timothy W. Deines, Clyde Treadwell:
Edge chipping in rotary ultrasonic machining of silicon. Int. J. Manuf. Res. 7(3): 311-329 (2012)

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