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"Cycle time simulation study for cluster tool operation in IC fabrication."

Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann (2011)

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DOI: 10.1504/IJMTM.2011.045508

access: closed

type: Journal Article

metadata version: 2020-06-04

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Amit Kumar Gupta, Appa Iyer Sivakumar, Peter Lendermann:
Cycle time simulation study for cluster tool operation in IC fabrication. Int. J. Manuf. Technol. Manag. 23(3/4): 179-192 (2011)

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