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"A comprehensive mathematical model to calculate polish time for oxide ..."

S. Kumar, T. K. Garg, V. P. Wani (2011)

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DOI: 10.1504/IJMTM.2011.038715

access: closed

type: Journal Article

metadata version: 2020-06-04

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S. Kumar, T. K. Garg, V. P. Wani:
A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP). Int. J. Manuf. Technol. Manag. 22(2): 145-159 (2011)

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