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"A Genetic Algorithm-Enhanced Sensor Marks Selection Algorithm for ..."

Aris Magklaras et al. (2023)

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DOI: 10.3390/INFO14080428

access: open

type: Journal Article

metadata version: 2024-01-13

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  dblp key:
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Aris Magklaras, Panayiotis Alefragis, Christos Gogos, Christos Valouxis, Alexios N. Birbas:
A Genetic Algorithm-Enhanced Sensor Marks Selection Algorithm for Wavefront Aberration Modeling in Extreme-UV (EUV) Photolithography. Inf. 14(8): 428 (2023)

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