"Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC ..."

Sumit Kumar Jindal, M. Aditya Varma, Deepali Thukral (2019)

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DOI: 10.1142/S0218126619502062

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type: Journal Article

metadata version: 2025-01-19

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Sumit Kumar Jindal, M. Aditya Varma, Deepali Thukral:
Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison. J. Circuits Syst. Comput. 28(12): 1950206:1-1950206:11 (2019)

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